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检测用的仪器与检测定位精度所用的相同。一般检测方法是在靠近各坐标行程中点及两端的任意三个位置进行测量，每个位置用快速移动定位，在相同条件下重复7次定位，测出停止位置数值并求出读数最大差值。以三个位置中最大一个差值的二分之一，附上正负符号，作为该坐标的重复定位精度，它是反映轴运动精度稳定性的最基本指标。
3、直线运动的原点返回精度检测
原点返回精度，实质上是该坐标轴上一个特殊点的重复定位精度，因此它的检测方法完全与重复定位精度相同。
4、直线运动的反向误差检测
直线运动的反向误差，也叫失动量，它包括该坐标轴进给传动链上驱动部位(如伺服电动机、伺趿液压马达和步进电动机等)的反向死区，各机械运动传动副的反向间隙和弹性变形等误差的综合反映。误差越大，则定位精度和重复定位精度也越低。
反向误差的检测方法是在所测坐标轴的行程内，预先向正向或反向移动一个距离并以此停止位置为基准，再在同一方向给予一定移动指令值，使之移动一段距离，然后再往相反方向移动相同的距离，测量停止位置与基准位置之差。在靠近行程的中点及两端的三个位置分别进行多次测定(一般为7次)，求出各个位置上的平均值，以所得平均值中的最大值为反向误差值。
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