SV-X2EN040A-A
清洗机是对硅片进行表面处理的设备，主要作用去除硅片表面污染物、自身氧化物，得到符合清洁度要求的硅片
产能提高
高重合精度
X2-MH高惯量系列
脉冲控制驱动器
CANopen控制驱动器
EtherCAT控制驱动器
脉冲控制驱动器
CANopen控制驱动器
50W
SV-X2MH005A-N2CA
SV-X3EA010A-A2
SV-X3EN010A-A2
SV-X3EB010A-A2
SV-X2EA010A-A
SV-X2EN010A-A
SV-X2MH005A-B2CA
SV-X2MH005A-N2CN
SV-X2MH005A-B2CN
100W
SV-X2MH010A-N2CA
SV-X3EA010A-A2
SV-X3EN010A-A2
SV-X3EB010A-A2
SV-X2EA010A-A
SV-X2EN010A-A
SV-X2MH010A-B2CA
SV-X2MH010A-N2CN
SV-X2MH010A-B2CN
150W
SV-X2MH015A-N2CA
SV-X3EA020A-A2
SV-X3EN020A-A2
SV-X3EB020A-A2
SV-X2EA020A-A
SV-X2EN020A-A
SV-X2MH015A-B2CA
SV-X2MH015A-N2CN
SV-X2MH015A-B2CN
200W
SV-X2MH020A-N2CA
SV-X3EA020A-A2
SV-X3EN020A-A2
SV-X3EB020A-A2
SV-X2EA020A-A
SV-X2EN020A-A
SV-X2MH020A-B2CA
SV-X2MH020A-N2CN
SV-X2MH020A-B2CN
400W
SV-X2MH040A-N2CA
SV-X3EA040A-A2
X3EN040A-A2
SV-X3EB040A-A2
SV-X2EA040A-A
SV-X2EN040A-A
SV-X2MH040A-B2CA
SV-X2MH040A-N2CN
SV-X2MH040A-B2CN
750W
SV-X2MH075A-N2CA
SV-X3EA075A-A2
SV-X3EN075A-A2
SV-X3EB075A-A2
SV-X2EA075A-A
SV-X2EN075A-A
SV-X2MH075A-B2CA
SV-X2MH075A-N2CN
SV-X2MH075A-B2CN
1KW
SV-X2MH100A-N2LA
SV-X3EA100A-A2
SV-X3EN100A-A2
SV-X3EB100A-A2
SV-X2EA100A-A
SV-X2EN100A-A
SV-X2MH100A-B2LA
SV-X2MH100A-N2LN
SV-X2MH100A-B2LN
1.5kw
SV-X2MH150A-N2LA
SV-X3EA150A-A2
SV-X3EN150A-A2
SV-X3EB150A-A2
SV-X2EA150A-A
SV-X2EN150A-A
SV-X2MH150A-B2LA
SV-X2MH150A-N2LN
SV-X2MH150A-B2LN
X2-MHH超高惯量系列
脉冲控制驱动器
CANopen控制驱动器
EtherCAT控制驱动器
脉冲控制驱动器
CANopen控制驱动器
100W
SV-X2MH010H-N2CA
SV-X3EA020A-A2
SV-X3EN020A-A2
SV-X3EB020A-A2
SV-X2EA020A-A
SV-X2EN020A-A
SV-X2MH010H-B2CA
SV-X2MH010H-N2CN
SV-X2MH010H-B2CN
200W
SV-X2MH020H-N2LA
SV-X3EA020A-A2
SV-X3EN020A-A2
SV-X3EB020A-A2
SV-X2EA020A-A
SV-X2EN020A-A
SV-X2MH020H-B2LA
SV-X2MH020H-N2LN
SV-X2MH020H-B2LN
400W
SV-X2MH040H-N2CA
SV-X3EA040A-A2
X3EN040A-A2
SV-X3EB040A-A2
SV-X2EA040A-A
SV-X2EN040A-A
SV-X2MH040H-B2CA
SV-X2MH040H-N2CN
SV-X2MH040H-B2CN
750W
SV-X2MH075H-N2LA
SV-X3EA075A-A2
SV-X3EN075A-A2
SV-X3EB075A-A2
SV-X2EA075A-A
SV-X2EN075A-A
SV-X2MH075H-B2LA
SV-X2MH075H-N2LN
SV-X2MH075H-B2LN
