A  带有机架号的键开关
B、C 冗余电源模件
D、E、F 三个主处理器
G 网络通讯模件（NCM），在COM槽内
H、I 空白
J、K 数字输入模件，带热插备伯
L、M 空白
N、O 数字输出模件，带热备
P、Q 留空
R 加强型智能通讯模件（EICM）
S 空白
图2-1 主机架,前视
 
2.1 主机架与扩展机架

Tricon机架可以用架装形式或盘装而装在工业标准的NEMA机壳内。主机架或扩展机架的具体尺寸为48.3cm×57.8cm×45.1cm（19英寸×22.75英寸×17.75英寸）（宽×高×深）。

图2-1和2-2示出标准的主机架和扩展机架。主机架可以支持下列模件：
—两个电源模件
—三个主处理器
—通讯模件，例如ICM、NCM、ACM或者SMM
—I/O模件，带热备
—通讯模件（仅限于#2扩展机架）

每个机架具有不同的总线地址（1到15）；机架内的每个模件具有地址，由位置或槽位决定它的具体地址（见附录B）。主机架上有一个四位置的键开关，用以控制整个的Tricon系统。开关的设定为RUN（运行）、PROGRAM（编程）、STOP（停止）和REMOTE（远程）。进一步的资料参阅第4章，“安装与检验”。

KLA-Tencor SLX Reflected  A-B  2711-K9A1  Light Assy 760-333022-000 Used

KLA-Tencor SLX Reflected Light Assy 760-333022-000 Used

KLA-Tencor AIT/UV Laser Servo Detector 0099572-000 New

KLA-Tencor Upper Housing Assy. 781-21332-000 working

KLA-Tencor CRS1010 BF/DF Control PCB 000675T

KLA-Tencor 5300 AMS Assy 720-480036-002 Used, Untested

KLA-Tencor SLX Preamp Assy. 775-334268-000 untested

KLA-Tencor CRS1010 Filter Wheel Drv. PCB 000674T

KLA Tencor P/N: 710-060031
Expedited shipping available A-B  2711-K9A1

NEAT 330UP Program Motion Controller KLA-Tencor CRS1010

KLA-Tencor V3 Objective Mount 760-062480-00 working

LOT KLA TENCOR POWER CHANGER ND FILTER MOTORS ACTUATORS

KLA-Tencor AIT UV Laser Servo Detector 0099586-001 Used

KLA-Tencor CRS1010 Solenoid PCB 000678 working

KLA-Tencor CRS1010 Driver Module 000675T working

KLA-Tencor CRS1010 Laser Power Board 0046591-000

KLA-Tencor Objective Mount Assy. 760-321062-001 working

KLA-Tencor CRS-1010 Control PCB 311-14988-1 working

KLA-Tencor SLX Relay/M5 Assembly 760-333019-001 Used

KLA-Tencor SLX Objective  A-B  2711-K9A1 Mount 760-333005-000 Untested

KLA-Tencor CRS1010 Turret Optics PCB 000676 working

KLA-Tencor CRS1010 BF/DF Control PCB 000675 working

KLA-Tencor CRS1010 Mirror Assembly working

KLA-Tencor CRS1010 Solenoid PCB Assy. 000678 working

KLA-Tencor SLX RF Bench Assy. 740-336864-001 working

KLA-Tencor CRS1010 Page Scanner PCB 000134

KLA-Tencor CRS1010 TRT/OPT PCB 001009T working

KLA Tencor Instruments PN: 080810 PCB ASSY, SFS-4500

KLA-Tencor SLX Objective Lens 760-334096-000 Untested

KLA-Tencor CRS1010 A-Stop Control PCB 001002 working

KLA-Tencor SLX Telescope A-B  2711-K9A1  Turret 740-333024-001 untested

KLA-Tencor SLX MAC Box Assy. 770-336660-001 untested

KLA-Tencor CRS1010 Lens Filter Assy. 002001 working

KLA-Tencor CRS1010 Camera Lens Filter 002001

KLA-Tencor PWA E11-13209-7 REV-D E11-13209

KLA-Tencor CRS1010 Solenoid PCB 000678T working

KLA Tencor PN: 770-809195-000 Image Processor Board

KLA-Tencor CRS1010 Camera Filter Assy. 000056 working

KLA-Tencor CRS1010 Lens Filter Assy. 000056 working

COMDEL CPS SERIES RF A-B  2711-K9A1   GENERATOR KLA TENCOR POWER SUPPLY

KLA-Tencor CRS1010 A-Stop Control PCB 001002 working

KLA-Tencor CRS1010 Filter Wheel Drv. PCB 000674 working

KLA-Tencor CRS1010 Fast Z Controller PCB 001003

KLA Tencor 730-656752-000 Cable Assy

KLA-Tencor CRS1010 Page Scanner PCB 000134 working

KLA-Tencor CRS1010 A-Stop Control PCB 001002T working

KLA-Tencor GSI Lumonics X-Y Scanner PCB CCA-10069 Pair